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Further studies of N doped a-SiC:H films deposited by PECVD.

Authors :
Huran, J.
Hotovy, I.
Kobzev, A. P.
Balalykin, N. I.
Source :
Sensors & Microsystems, Proceedings of the 5th Italian Conference - Extended To Mediterranean Countries; 2000, p355-360, 6p
Publication Year :
2000

Subjects

Subjects :
INTEGRATED circuits
SILICON carbide
IRRADIATION
ELECTRON beams
THIN films

Details

Language :
English
ISBNs :
9789810244873
Database :
Complementary Index
Journal :
Sensors & Microsystems, Proceedings of the 5th Italian Conference - Extended To Mediterranean Countries
Publication Type :
Conference
Accession number :
129195532

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