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SiGe NANOCRYSTAL FORMATION IN PECVD GROWN SiOx/Si/Ge/Si/SiOx MULTILAYERS.

Authors :
AĞAN, S.
AYDINLI, A.
Source :
Physics, Chemistry & Application of Nanostructures: Reviews & Short Notes - Proceedings of the International Conference on Nanomeeting 2009; 2009, p77-80, 4p
Publication Year :
2009

Subjects

Subjects :
NANOCRYSTALS
SILICON oxide
GERMANIUM
ANNEALING of metals
THIN films

Details

Language :
English
ISBNs :
9789814280358
Database :
Complementary Index
Journal :
Physics, Chemistry & Application of Nanostructures: Reviews & Short Notes - Proceedings of the International Conference on Nanomeeting 2009
Publication Type :
Conference
Accession number :
129138637

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