Parametric computational study of sheaths in multicomponent Ar/O2 plasma.

Details

Language :

English

ISSN :

17426588

Volume :

982

Issue :

1

Database :

Complementary Index

Journal :

Journal of Physics: Conference Series

Publication Type :

Academic Journal

Accession number :

128363746

Full Text :

https://doi.org/10.1088/1742-6596/982/1/012008