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Decaying Time Constant Enhanced MEMS Disk Resonator for High Precision Gyroscopic Application.
- Source :
- IEEE/ASME Transactions on Mechatronics; Feb2018, Vol. 23 Issue 1, p452-458, 7p
- Publication Year :
- 2018
-
Abstract
- This paper reports a new design strategy of adding lumped masses to the frame structure of a disk resonator gyroscope (DRG) to mitigate its figure of merit (FOM). A greatly enhanced decaying time constant τ can lead to very small FOM, which could then greatly mitigate the DRG's bias and bias drift. Additionally, this technique could also reduce the Brownian noise floor. A comprehensive investigation of the possible ways to add the lumped masses is presented, and a detailed design guideline is provided. A DRG prototype based on this design strategy is then presented and shows a τ of 38.5 s, a quality factor Q of 358 k, and a FOM of 1.9°/s. The prototype is operated in the force-to-rebalance mode, and an angle random walk of 0.012°/√h and a bias stability of 0.08°/h are demonstrated experimentally. This design strategy is suitable for use in batch fabrication of very high precision microelectromechanical systems devices such as gyroscopes. [ABSTRACT FROM PUBLISHER]
Details
- Language :
- English
- ISSN :
- 10834435
- Volume :
- 23
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- IEEE/ASME Transactions on Mechatronics
- Publication Type :
- Academic Journal
- Accession number :
- 128115016
- Full Text :
- https://doi.org/10.1109/TMECH.2018.2790406