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Decaying Time Constant Enhanced MEMS Disk Resonator for High Precision Gyroscopic Application.

Authors :
Zhou, Xin
Xiao, Dingbang
Li, Qingsong
Hou, Zhanqiang
He, Kaixuan
Chen, Zhihua
Wu, Yulie
Wu, Xuezhong
Source :
IEEE/ASME Transactions on Mechatronics; Feb2018, Vol. 23 Issue 1, p452-458, 7p
Publication Year :
2018

Abstract

This paper reports a new design strategy of adding lumped masses to the frame structure of a disk resonator gyroscope (DRG) to mitigate its figure of merit (FOM). A greatly enhanced decaying time constant τ can lead to very small FOM, which could then greatly mitigate the DRG's bias and bias drift. Additionally, this technique could also reduce the Brownian noise floor. A comprehensive investigation of the possible ways to add the lumped masses is presented, and a detailed design guideline is provided. A DRG prototype based on this design strategy is then presented and shows a τ of 38.5 s, a quality factor Q of 358 k, and a FOM of 1.9°/s. The prototype is operated in the force-to-rebalance mode, and an angle random walk of 0.012°/√h and a bias stability of 0.08°/h are demonstrated experimentally. This design strategy is suitable for use in batch fabrication of very high precision microelectromechanical systems devices such as gyroscopes. [ABSTRACT FROM PUBLISHER]

Details

Language :
English
ISSN :
10834435
Volume :
23
Issue :
1
Database :
Complementary Index
Journal :
IEEE/ASME Transactions on Mechatronics
Publication Type :
Academic Journal
Accession number :
128115016
Full Text :
https://doi.org/10.1109/TMECH.2018.2790406