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Optical metrology for the investigation of buried technical structures.

Authors :
Göring, Lena
Finkeldey, Markus
Schellenberg, Falk
Brenner, Carsten
Hofmann, Martin R.
Gerhardt, Nils C.
Source :
Technisches Messen; Feb2018, Vol. 85 Issue 2, p104-110, 7p
Publication Year :
2018

Abstract

<i>Copyright of Technisches Messen is the property of De Gruyter and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)

Details

Language :
English
ISSN :
01718096
Volume :
85
Issue :
2
Database :
Complementary Index
Journal :
Technisches Messen
Publication Type :
Academic Journal
Accession number :
128106745
Full Text :
https://doi.org/10.1515/teme-2017-0096