Numerical and experimental thermal analysis of polyimide-based x-ray masks at the Canadian Light Source.

MLA

Achenbach, Sven, et al. “Numerical and Experimental Thermal Analysis of Polyimide-Based x-Ray Masks at the Canadian Light Source.” Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, vol. 36, no. 1, Jan. 2018, p. 1–N.PAG. EBSCOhost, https://doi.org/10.1116/1.5005115.

APA

Achenbach, S., Shen, C., & Wells, G. (2018). Numerical and experimental thermal analysis of polyimide-based x-ray masks at the Canadian Light Source. Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, 36(1), 1–N.PAG. https://doi.org/10.1116/1.5005115

Chicago

Achenbach, Sven, Chen Shen, and Garth Wells. 2018. “Numerical and Experimental Thermal Analysis of Polyimide-Based x-Ray Masks at the Canadian Light Source.” Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics 36 (1): 1–N.PAG. doi:10.1116/1.5005115.