Cite
Relationship between Grain Structures and Texture of Damascene Cu Lines.
MLA
Jong-Min Paik, et al. “Relationship between Grain Structures and Texture of Damascene Cu Lines.” Journal of Electronic Materials, vol. 33, no. 1, Jan. 2004, pp. 48–52. EBSCOhost, https://doi.org/10.1007/s11664-004-0293-5.
APA
Jong-Min Paik, Ki-Chul Park, & Young-Chang Joo, W. H. (2004). Relationship between Grain Structures and Texture of Damascene Cu Lines. Journal of Electronic Materials, 33(1), 48–52. https://doi.org/10.1007/s11664-004-0293-5
Chicago
Jong-Min Paik, Ki-Chul Park, and W. H. Young-Chang Joo. 2004. “Relationship between Grain Structures and Texture of Damascene Cu Lines.” Journal of Electronic Materials 33 (1): 48–52. doi:10.1007/s11664-004-0293-5.