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Low reflection Fresnel lenses via double imprint combined with vacuum-UV surface hardening.
- Source :
- Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2017, Vol. 35 Issue 6, p1-7, 7p
- Publication Year :
- 2017
-
Abstract
- To improve the optical performance of Fresnel lenses, a technique for preparing them with antireflective structures of the moth-eye type is developed. Masters featuring such hierarchical structures are prepared in SU-8, a negative tone photoresist, by two consecutive thermal imprint steps. The moth-eye structures imprinted first are vacuum ultraviolet-treated at 172 nm to provide a surface-near the cross-linked layer that remains stable during the second imprint of the 100 µm sized Fresnel structures. A successful combination of both structure types is possible at an imprint temperature as low as 45 °C. This can be understood on the basis of the typical exposure and the crosslinking behavior of a chemically amplified negative tone resist like SU-8. The masters prepared in this way will be subjected to extrusion coating, the process of choice for future large area preparation of such structures in a single step. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 21662746
- Volume :
- 35
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
- Publication Type :
- Academic Journal
- Accession number :
- 126537196
- Full Text :
- https://doi.org/10.1116/1.4991863