Cite
Defectivity and Yield Impact From the AMC Inside the FOUP in Advanced Technologies.
MLA
Barker, John, et al. “Defectivity and Yield Impact From the AMC Inside the FOUP in Advanced Technologies.” IEEE Transactions on Semiconductor Manufacturing, vol. 30, no. 4, Nov. 2017, pp. 434–39. EBSCOhost, https://doi.org/10.1109/TSM.2017.2759242.
APA
Barker, J., Miner, S., Zhao, W., Kim, J. S., Moore, J., Ramanathan, E., Case, S., & Waite, S. (2017). Defectivity and Yield Impact From the AMC Inside the FOUP in Advanced Technologies. IEEE Transactions on Semiconductor Manufacturing, 30(4), 434–439. https://doi.org/10.1109/TSM.2017.2759242
Chicago
Barker, John, Stephen Miner, Wei Zhao, Jong Soo Kim, Joshua Moore, Eswar Ramanathan, Sara Case, and Stephanie Waite. 2017. “Defectivity and Yield Impact From the AMC Inside the FOUP in Advanced Technologies.” IEEE Transactions on Semiconductor Manufacturing 30 (4): 434–39. doi:10.1109/TSM.2017.2759242.