بررسی محیط سیال و اثر اندازه بر روی رفتار دینامیکی میکروصفحه

This paper analyzes the effect of squeeze film and size effect on dynamic response of microplate. The microplate in this work is a clamped-clamped plate, which is excited using electrostatic force. The gap between microplate and substrate is filled with air. First order shear deformation theory (FSDT) and couple stress theory (CST) and considering Von Karman's strains are used to model the equation of motion of microplate. Non-linear Reynolds equation based on Micropolar theorem is deployed to apply the size effect on the fluid. Afterward, Equations are discretized by applying couple finite element method and finite difference method. The first-order differential equations are solved utilizing Newmark's method. One of the contributions is presenting the influences of size effect and mid-plane stretching on the microplate dynamic behavior, also the influence of different parameters on the quality factor. According to the results, mid-plane stretching effect increases the microplate rigidity. Interestingly, this effect is more dominant for voltages with higher amplitude. This paper emphasizes that considering the plate size effect will increase the rigidity of the system. Moreover, the plate size effect increases the rigidity of the system whereas the fluid size effect decreases it. Increasing the fluid's pressure results in decrease in the amplitude of oscillations in step voltage excitation which postpones the dynamic pull-in. This paper concludes that increasing the coupling parameter of fluid increases the natural frequency of microplate, whereas increasing the fluid length scale parameter decreases the natural frequency and quality factor of the system. [ABSTRACT FROM AUTHOR]