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Three-Dimensional Nanoscale Mapping of State-of-the-Art Field-Effect Transistors (FinFETs).
- Source :
- Microscopy & Microanalysis; Oct2017, Vol. 23 Issue 5, p916-925, 10p
- Publication Year :
- 2017
Details
- Language :
- English
- ISSN :
- 14319276
- Volume :
- 23
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- Microscopy & Microanalysis
- Publication Type :
- Academic Journal
- Accession number :
- 125462549
- Full Text :
- https://doi.org/10.1017/S1431927617012491