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Three-Dimensional Nanoscale Mapping of State-of-the-Art Field-Effect Transistors (FinFETs).

Authors :
Parikh, Pritesh
Senowitz, Corey
Lyons, Don
Martin, Isabelle
Prosa, Ty J.
DiBattista, Michael
Devaraj, Arun
Meng, Y. Shirley
Source :
Microscopy & Microanalysis; Oct2017, Vol. 23 Issue 5, p916-925, 10p
Publication Year :
2017

Details

Language :
English
ISSN :
14319276
Volume :
23
Issue :
5
Database :
Complementary Index
Journal :
Microscopy & Microanalysis
Publication Type :
Academic Journal
Accession number :
125462549
Full Text :
https://doi.org/10.1017/S1431927617012491