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Effect of methane on stability of plasma in a MW-assisted hydrogen-methane plasma.
- Source :
- EPJ Web of Conferences; 2017, Vol. 149, p1-1, 1p
- Publication Year :
- 2017
-
Abstract
- The article examines the effects of methane concentration in hydrogen plasma for carbon material processing. Results of the study show the impact of methane concentration on microwave (MW)-plasma coupling, the understanding of precursor gas effects on MW-plasma coupling, and the uncertainty of MW power.
Details
- Language :
- English
- ISSN :
- 21016275
- Volume :
- 149
- Database :
- Complementary Index
- Journal :
- EPJ Web of Conferences
- Publication Type :
- Conference
- Accession number :
- 124471106
- Full Text :
- https://doi.org/10.1051/epjconf/201714902020