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Influence of binding material of PZT coating on microresonator's electrical and mechanical properties.
- Source :
- Proceedings of SPIE; 6/2/2017, Vol. 10246, p1-7, 7p
- Publication Year :
- 2017
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10246
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 124156878
- Full Text :
- https://doi.org/10.1117/12.2265978