Study on the optical properties of β-GaO films grown by MOCVD.

β-GaO films were grown on c-plane sapphire substrates at different substrate temperatures by metal-organic chemical vapor deposition. The effects of substrate temperature on transparence, optical band gap and photoluminescence of the films were studied systematically. With increasing the substrate temperature, the films structure was changed from amorphous to single orientation β-GaO. The β-GaO films exhibited excellent optical transparency in the ultraviolet and visible regions. The ultraviolet-blue photoluminescence was observed at room temperature. The temperature-dependent photoluminescence was also carried out and the relative intensity of the blue emission with respect to the ultraviolet emission decreased with increasing the measured temperature. The origin of luminescence was discussed. [ABSTRACT FROM AUTHOR]