Effect of SiN Treatment on Optical Properties of InGaN/GaN MQW Blue LEDs.

In this paper, Si-doped GaN template layer and nitride-based multiple quantum well (MQW) light-emitting diodes (LEDs) with conventional GaN buffer layer and GaN buffer layer using SiN treatment were elaborated by metalorganic vapor phase epitaxy (MOVPE). On both kinds of structures, five InGaN/GaN quantum wells were deposited simultaneously in identical growth conditions. GaN template layer defects that influence on the growth of InGaN/GaN MQW LEDs were systematically studied by means of scanning electron microscopy, high-resolution x-ray diffraction, temperature-dependant photoluminescence measurement, and electroluminescence. It is shown that optical properties of InGaN/GaN MQWs depend on the defect density of elaborated templates. Thereafter, we report an enhancement of the emission of blue MQW LEDs using SiN treatment, compared to the MQW LED emissions deposited on a conventional GaN buffer layer. [ABSTRACT FROM AUTHOR]