P-6: The Effects of Buffer Layers on the Electrical Characteristics and Stability of Self-Aligned Top-Gate IGZO Thin Film Transistors.

The composition of buffer layer would be played a key role to affect the electrical performance and the reliability of the self-aligned top-gate a-IGZO TFTs. In this work, the threshold voltage shift (ΔVth) of the device could be less than ±1V under positive and negative bias thermal illumination stress. [ABSTRACT FROM AUTHOR]