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Piezoelectric Response Evaluation of ZnO Thin Film Prepared by RF Magnetron Sputtering.

Authors :
Da-Long Cheng
Kuo-Sheng Kao
Chia-Hua Liang
Yu-Che Wang
Yu-Chieh Chen
Wei-Che Shih
Leong-Perng Chan
Source :
MATEC Web of Conferences; 6/15/2017, Vol. 109, p1-6, 6p
Publication Year :
2017

Details

Language :
English
ISSN :
22747214
Volume :
109
Database :
Complementary Index
Journal :
MATEC Web of Conferences
Publication Type :
Conference
Accession number :
123353680
Full Text :
https://doi.org/10.1051/matecconf/201710904001