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MEMS based vacuum packaging method of optically readable infrared focal plane array.
- Source :
- Microsystem Technologies; Jun2017, Vol. 23 Issue 6, p1793-1798, 6p
- Publication Year :
- 2017
-
Abstract
- A MEMS based vacuum packaging method is developed for uncooled optically readable infrared focal plane array (OR-IRFPA). The vacuum packaging structure is made up of three layers: a glass visible window, a silicon spacer, and a silicon infrared window. The silicon spacer is bonded with the glass visible window to form two cavities: one cavity for getter and another one for OR-IRFPA. The isolation wall with micrometer scale pores is designed to ensure air's free flow between two cavities and prevent getter powder from harming pixels of OR-IRFPA. The infrared window is used as cover board and selectively transmitting 8-14 μm infrared radiation. Infrared images of human body are gotten by using the vacuum packaged OR-IRFPA, which shows the vacuum packaging method is feasible and useful for OR-IRFPA. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09467076
- Volume :
- 23
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Microsystem Technologies
- Publication Type :
- Academic Journal
- Accession number :
- 123085037
- Full Text :
- https://doi.org/10.1007/s00542-016-3036-7