Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics.

MLA

Layes, Vincent, et al. “Composite Targets in HiPIMS Plasmas: Correlation of in-Vacuum XPS Characterization and Optical Plasma Diagnostics.” Journal of Applied Physics, vol. 121, no. 17, May 2017, pp. 1–9. EBSCOhost, https://doi.org/10.1063/1.4977820.

APA

Layes, V., Monje, S., Corbella, C., Schulz-von der Gathen, V., von Keudell, A., & de los Arcos, T. (2017). Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics. Journal of Applied Physics, 121(17), 1–9. https://doi.org/10.1063/1.4977820

Chicago

Layes, Vincent, Sascha Monje, Carles Corbella, Volker Schulz-von der Gathen, Achim von Keudell, and Teresa de los Arcos. 2017. “Composite Targets in HiPIMS Plasmas: Correlation of in-Vacuum XPS Characterization and Optical Plasma Diagnostics.” Journal of Applied Physics 121 (17): 1–9. doi:10.1063/1.4977820.