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Integrated Virtual Impactor Enabled PM2.5 Sensor.
- Source :
- IEEE Sensors Journal; May2017, Vol. 17 Issue 9, p2814-2821, 8p
- Publication Year :
- 2017
-
Abstract
- As more and more proofs show that fine particles (diameter of 2.5~\mu \textm and below) pose more risk on human health than coarse particles, an increasing need for monitoring fine particles has emerged. A miniaturized sensor designed for measuring fine particle concentration is presented in this paper. The proposed sensor possesses a compact size of only 15 mm $\times10$ mm \times1$ mm. A virtual impactor has been integrated as a particle size selector and the design is optimized by simulation-assisted analysis. The sensor is realized by silicon microfabrication and wafer-level packaging. Testing results show that a high measurement accuracy of 2.55~\mu \text{g}/\text{m}^{3} has been achieved. [ABSTRACT FROM PUBLISHER]
Details
- Language :
- English
- ISSN :
- 1530437X
- Volume :
- 17
- Issue :
- 9
- Database :
- Complementary Index
- Journal :
- IEEE Sensors Journal
- Publication Type :
- Academic Journal
- Accession number :
- 122577422
- Full Text :
- https://doi.org/10.1109/JSEN.2017.2683443