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Reactive Ion Etching Process of Micro Mechanical Pendulum.
- Source :
- MATEC Web of Conferences; 1/11/2017, Vol. 95, p1-4, 4p, 2 Color Photographs, 6 Black and White Photographs, 2 Charts, 3 Graphs
- Publication Year :
- 2017
Details
- Language :
- English
- ISSN :
- 22747214
- Volume :
- 95
- Database :
- Complementary Index
- Journal :
- MATEC Web of Conferences
- Publication Type :
- Conference
- Accession number :
- 121217161
- Full Text :
- https://doi.org/10.1051/matecconf/20179507024