Research on Applications of MOCVD based Automatic Control Circuits.

With the rapid development of semi-conductor science and related hardware devices, the applications of MOCVD based automatic control system are becoming popular. MOCVD method of preparation of thin films is the metal organic matter after gasification, respectively using carrier gas into the reaction chamber. In indoor produces chemical reaction, reaction products of deposition on the substrate to form a thin film. In this paper, we introduce the applications of MOCVD based automatic control circuits in detail. The simulation result proves the effectiveness of the system. [ABSTRACT FROM AUTHOR]