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Crucial role of reactive pulse-gas on a sputtered Zn3N2 thin film formation.
- Source :
- RSC Advances; 2016, Vol. 6 Issue 97, p94905-94910, 6p
- Publication Year :
- 2016
Details
- Language :
- English
- ISSN :
- 20462069
- Volume :
- 6
- Issue :
- 97
- Database :
- Complementary Index
- Journal :
- RSC Advances
- Publication Type :
- Academic Journal
- Accession number :
- 118713027
- Full Text :
- https://doi.org/10.1039/c6ra09972f