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Oxide stoichiometry-controlled TaOx-based resistive switching behaviors.
- Source :
- Applied Physics Letters; 10/3/2016, Vol. 109 Issue 14, p1-5, 5p, 1 Diagram, 1 Chart, 4 Graphs
- Publication Year :
- 2016
-
Abstract
- We examine the influence of variable oxygen concentration in TaO<subscript>x</subscript> active layers on the forming process and bipolar resistive switching (BRS) features of TaO<subscript>x</subscript>-based resistive switching cells. TaO<subscript>x</subscript> active layers prepared using various rf sputtering powers were systematically analyzed to identify the relation between initial compositions and BRS behavior. Proper control of oxygen vacancy concentration was clearly identified as a basic factor in ensuring typical BRS features without affecting the structural properties. We describe the possible origins of both conduction and switching based on the variation of oxygen concentrations initially provided by the growth conditions. [ABSTRACT FROM AUTHOR]
- Subjects :
- SPUTTERING (Physics)
OXYGEN
RESISTIVE force
VISCOSITY
CONDUCTION bands
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 109
- Issue :
- 14
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 118683569
- Full Text :
- https://doi.org/10.1063/1.4963884