Effects of the sputtering gas conditions on the structural, optical and magnetic properties of Cu, Co codoped ZnO multilayer films.

The Cu, Co codoped ZnO multilayer films were deposited by magnetron sputtering on silicon (100) in different sputtering gas and the substrates were held at 500 °C. The oxygen content in the films were correlated with the oxygen prevailed in the sputter chamber. The influences of the oxygen content in the sputtering gas on structural, optical and magnetic properties of Cu, Co codoped ZnO multilayer films were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, transmission electron microscopy, UV absorption spectrophotometer and vibrating sample magnetometer. The results indicated that Cu and Co ions would uniformly substitute into the Zn sites of ZnO lattice. The optical band gap of the films increased from 3.14 to 3.23 eV with increasing oxygen content of the sputtering gas. Oxygen concent have effected on the ferromagnetism of the samples. [ABSTRACT FROM AUTHOR]