Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications.

MLA

Serra, E., et al. “Microfabrication of Large-Area Circular High-Stress Silicon Nitride Membranes for Optomechanical Applications.” AIP Advances, vol. 6, no. 6, June 2016, pp. 065004-1-065004-8. EBSCOhost, https://doi.org/10.1063/1.4953805.

APA

Serra, E., Bawaj, M., Borrielli, A., Di Giuseppe, G., Forte, S., Kralj, N., Malossi, N., Marconi, L., Marin, F., Marino, F., Morana, B., Natali, R., Pandraud, G., Pontin, A., Prodi, G. A., Rossi, M., Sarro, P. M., Vitali, D., & Bonaldi, M. (2016). Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications. AIP Advances, 6(6), 065004-1-065004-8. https://doi.org/10.1063/1.4953805

Chicago

Serra, E., M. Bawaj, A. Borrielli, G. Di Giuseppe, S. Forte, N. Kralj, N. Malossi, et al. 2016. “Microfabrication of Large-Area Circular High-Stress Silicon Nitride Membranes for Optomechanical Applications.” AIP Advances 6 (6): 065004-1-065004-8. doi:10.1063/1.4953805.