Investigation of embedded silicon germanium typical defect solution for advanced CMOS process.

Details

Language :

English

ISBNs :

9781467388047

Database :

Complementary Index

Journal :

2016 China Semiconductor Technology International Conference (CSTIC)

Publication Type :

Conference

Accession number :

116444852

Full Text :

https://doi.org/10.1109/CSTIC.2016.7464015