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Ion implantation technology in SiC for high-voltage/high-temperature devices.

Authors :
Kimoto, T.
Kawahara, K.
Kaji, N.
Fujihara, H.
Suda, J.
Source :
2016 16th International Workshop on Junction Technology (IWJT); 2016, p54-58, 5p
Publication Year :
2016

Details

Language :
English
ISBNs :
9781467399630
Database :
Complementary Index
Journal :
2016 16th International Workshop on Junction Technology (IWJT)
Publication Type :
Conference
Accession number :
116443109
Full Text :
https://doi.org/10.1109/IWJT.2016.7486673