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Ion implantation technology in SiC for high-voltage/high-temperature devices.
- Source :
- 2016 16th International Workshop on Junction Technology (IWJT); 2016, p54-58, 5p
- Publication Year :
- 2016
Details
- Language :
- English
- ISBNs :
- 9781467399630
- Database :
- Complementary Index
- Journal :
- 2016 16th International Workshop on Junction Technology (IWJT)
- Publication Type :
- Conference
- Accession number :
- 116443109
- Full Text :
- https://doi.org/10.1109/IWJT.2016.7486673