Back to Search
Start Over
ChemInform Abstract: Improvement of Dielectric Strength of Trench Capacitors by Using Rapidly Grown SiO2 Films.
- Source :
- ChemInform; Jul1990, Vol. 21 Issue 31, pno-no, 2p
- Publication Year :
- 1990
Details
- Language :
- English
- ISSN :
- 09317597
- Volume :
- 21
- Issue :
- 31
- Database :
- Complementary Index
- Journal :
- ChemInform
- Publication Type :
- Academic Journal
- Accession number :
- 115671225
- Full Text :
- https://doi.org/10.1002/chin.199031334