Single-electron transistors featuring silicon nitride tunnel barriers prepared by atomic layer deposition.

Details

Language :

English

ISBNs :

9781467386098

Database :

Complementary Index

Journal :

2016 Joint International EUROSOI Workshop & International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)

Publication Type :

Conference

Accession number :

115624205

Full Text :

https://doi.org/10.1109/ULIS.2016.7440045