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ChemInform Abstract: Selective Oxidation Using Ultrathin Nitrogen-Rich Silicon Surface Layers Grown by Rapid Thermal Processing.

Authors :
PAZ DE ARAUJO, C. A.
HUANG, Y. P.
GALLEGOS, R.
Source :
ChemInform; Nov1989, Vol. 20 Issue 46, pno-no, 1p
Publication Year :
1989

Details

Language :
English
ISSN :
09317597
Volume :
20
Issue :
46
Database :
Complementary Index
Journal :
ChemInform
Publication Type :
Academic Journal
Accession number :
115606659
Full Text :
https://doi.org/10.1002/chin.198946334
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