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Modification of "native" surface donor states in AlGaN/GaN MIS-HEMTs by fluorination: Perspective for defect engineering.

Authors :
Reiner, M.
Lagger, P.
Prechtl, G.
Steinschifter, P.
Pietschnig, R.
Pogany, D.
Ostermaier, C.
Source :
2015 IEEE International Electron Devices Meeting (IEDM); 1/1/2015, p1.4-35.5.4, 0p
Publication Year :
2015

Details

Language :
English
ISBNs :
9781467398947
Database :
Complementary Index
Journal :
2015 IEEE International Electron Devices Meeting (IEDM)
Publication Type :
Conference
Accession number :
114303725
Full Text :
https://doi.org/10.1109/IEDM.2015.7409834