Lateral porous silicon membranes with tunable pore size for on-chip separation.

Details

Language :

English

ISBNs :

9781509019731

Database :

Complementary Index

Journal :

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)

Publication Type :

Conference

Accession number :

114300005

Full Text :

https://doi.org/10.1109/MEMSYS.2016.7421670