Back to Search
Start Over
Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer.
Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer.
- Source :
- Physica Status Solidi. A: Applications & Materials Science; Jan2016, Vol. 213 Issue 1, p114-121, 8p
- Publication Year :
- 2016
-
Abstract
- This paper presents a method to determine the mechanical properties of piezoelectric thin films. The vibrational behavior of microcantilevers and clamped-clamped beams actuated by aluminum nitride (AlN) piezoelectric films were analyzed in order to investigate the suitability of these devices as characterization tools. Different geometries of resonators composed of a free-standing structure made up of a TiPt/AlN/TiPt piezoelectric stack were tested. The out-of-plane motion of the resonators was assessed by laser Doppler vibrometry. An AlN Young's modulus of about 200 GPa was extracted from resonance-frequency measurements by means of Comsol software simulations that allow taking into account AlN underetching. This value of Young's modulus was compared to the one measured by a nanoindentation technique. The quality of crystallinity was also assessed using X-ray diffraction (XRD) measurements. We then estimated the residual stress (about 200 MPa) using an interferometry measurement. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 18626300
- Volume :
- 213
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Physica Status Solidi. A: Applications & Materials Science
- Publication Type :
- Academic Journal
- Accession number :
- 112212936
- Full Text :
- https://doi.org/10.1002/pssa.201532302