300 mm InGaAsOI substrate fabrication using the Smart CutTM technology.

Authors :: Sollier, S.
Widiez, J.
Gaudin, G.
Mazen, F.
Baron, T.
Martin, M.
Roure, M C.
Besson, P.
Morales, C.
Beche, E.
Fournel, F.
Favier, S.
Salaun, A.
Gergaud, P.
Cordeau, M.
Veytizou, C.
Ecarnot, L.
Delprat, D.
Radu, I.
Signamarcheix, T.
Source :: 2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S); 2015, p1-2, 2p
Publication Year :: 2015

Language :: English
ISBNs :: 9781509002597
Database :: Complementary Index
Journal :: 2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)
Publication Type :: Conference
Accession number :: 111591174
Full Text :: https://doi.org/10.1109/S3S.2015.7333495