Thin amorphous silicon oxide ICPECVD layer on gold surface for surface plasmon resonance measurements.

Details

Language :

English

ISBNs :

9781467373562

Database :

Complementary Index

Journal :

2015 IEEE International Interconnect Technology Conference & 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)

Publication Type :

Conference

Accession number :

111588248

Full Text :

https://doi.org/10.1109/IITC-MAM.2015.7325632