The Fringe-Capacitance of Etching Holes for CMOS-MEMS.

MLA

Yi-Ta Wang, et al. “The Fringe-Capacitance of Etching Holes for CMOS-MEMS.” Micromachines, vol. 6, no. 11, Dec. 2015, pp. 1617–28. EBSCOhost, https://doi.org/10.3390/mi6111445.

APA

Yi-Ta Wang, Yuh-Chung Hu, Wen-Chang Chu, & Pei-Zen Chang. (2015). The Fringe-Capacitance of Etching Holes for CMOS-MEMS. Micromachines, 6(11), 1617–1628. https://doi.org/10.3390/mi6111445

Chicago

Yi-Ta Wang, Yuh-Chung Hu, Wen-Chang Chu, and Pei-Zen Chang. 2015. “The Fringe-Capacitance of Etching Holes for CMOS-MEMS.” Micromachines 6 (11): 1617–28. doi:10.3390/mi6111445.