Characterizing MEMS nonlinearities directly: The ring-down measurements.

Authors :: Polunin, P.
Yang, Y.
Atalaya, J.
Ng, E.
Strachan, S.
Shoshani, O.
Dykman, M.
Shaw, S.
Kenny, T.
Source :: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS); 2015, p2176-2179, 4p
Publication Year :: 2015

Language :: English
ISBNs :: 9781479989553
Database :: Complementary Index
Journal :: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS)
Publication Type :: Conference
Accession number :: 110068174
Full Text :: https://doi.org/10.1109/TRANSDUCERS.2015.7181391