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Wireless drive of a MEMS ciliary motion actuator via coupled magnetic resonances using micro inductors.

Authors :
Sakamoto, N.
Frappe, A.
Stefanelli, B.
Kaiser, A.
Mita, Y.
Source :
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS); 2015, p1961-1964, 4p
Publication Year :
2015

Details

Language :
English
ISBNs :
9781479989553
Database :
Complementary Index
Journal :
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS)
Publication Type :
Conference
Accession number :
110068120
Full Text :
https://doi.org/10.1109/TRANSDUCERS.2015.7181337
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