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A rotational MEMS diffraction grating for realization of micro-sized spectroscope system.
- Source :
- 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS); 2015, p208-211, 4p
- Publication Year :
- 2015
Details
- Language :
- English
- ISBNs :
- 9781479989553
- Database :
- Complementary Index
- Journal :
- 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS)
- Publication Type :
- Conference
- Accession number :
- 110067667
- Full Text :
- https://doi.org/10.1109/TRANSDUCERS.2015.7180898