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A rotational MEMS diffraction grating for realization of micro-sized spectroscope system.

Authors :
Yamamoto, Y.
Shinozaki, R.
Oka, Y.
Asahi, I.
Ninomiya, H.
Shimokawa, F.
Oohira, F.
Takao, H.
Source :
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS); 2015, p208-211, 4p
Publication Year :
2015

Details

Language :
English
ISBNs :
9781479989553
Database :
Complementary Index
Journal :
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators & Microsystems (TRANSDUCERS)
Publication Type :
Conference
Accession number :
110067667
Full Text :
https://doi.org/10.1109/TRANSDUCERS.2015.7180898