Influence of residual pressure and ion implantation on the structure, elemental composition, and properties of (TiZrAlYNb)N nitrides.

The nitrides of high-entropy alloys, (TiZrAlYNb)N, fabricated by cathodic vacuum arc evaporation are studied with electron microscopy, atomic force microscopy, laser scanning microscopy; energy-dispersive X-ray analysis, X-ray phase analysis, time-of-flight secondary-ion mass spectrometry; and hardness measurements. It is found that the deposition parameters influence the structure, surface morphology, element distribution, and mechanical properties. The structural-phase state of the coatings before and after the ion implantation of heavy negative gold ions Au are compared. [ABSTRACT FROM AUTHOR]