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The new methodology of contact process window vericification.
- Source :
- 2015 China Semiconductor Technology International Conference; 2015, p1-3, 3p
- Publication Year :
- 2015
Details
- Language :
- English
- ISBNs :
- 9781479972418
- Database :
- Complementary Index
- Journal :
- 2015 China Semiconductor Technology International Conference
- Publication Type :
- Conference
- Accession number :
- 108855485
- Full Text :
- https://doi.org/10.1109/CSTIC.2015.7153354