Electrical, Mechanical, and Hermetic Properties of Low-Temperature, Plasma Activated Direct Silicon Bonded Joints.

Details

Language :

English

ISSN :

21628769

Volume :

4

Issue :

7

Database :

Complementary Index

Journal :

ECS Journal of Solid State Science & Technology

Publication Type :

Academic Journal

Accession number :

103528208

Full Text :

https://doi.org/10.1149/2.0271507jss