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Quasi-static capacitance measurements in pseudo-MOSFET configuration for Dit extraction in SOI wafers.

Authors :
Pirro, L.
Ionica, I.
Mescot, X.
Cristoloveanu, S.
Ghibaudo, G.
Faraone, L.
Source :
EUROSOI-ULIS 2015: 2015 Joint International EUROSOI Workshop & International Conference on Ultimate Integration on Silicon; 2015, p249-252, 4p
Publication Year :
2015

Details

Language :
English
ISBNs :
9781479969111
Database :
Complementary Index
Journal :
EUROSOI-ULIS 2015: 2015 Joint International EUROSOI Workshop & International Conference on Ultimate Integration on Silicon
Publication Type :
Conference
Accession number :
102551635
Full Text :
https://doi.org/10.1109/ULIS.2015.7063820