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Quasi-static capacitance measurements in pseudo-MOSFET configuration for Dit extraction in SOI wafers.
- Source :
- EUROSOI-ULIS 2015: 2015 Joint International EUROSOI Workshop & International Conference on Ultimate Integration on Silicon; 2015, p249-252, 4p
- Publication Year :
- 2015
Details
- Language :
- English
- ISBNs :
- 9781479969111
- Database :
- Complementary Index
- Journal :
- EUROSOI-ULIS 2015: 2015 Joint International EUROSOI Workshop & International Conference on Ultimate Integration on Silicon
- Publication Type :
- Conference
- Accession number :
- 102551635
- Full Text :
- https://doi.org/10.1109/ULIS.2015.7063820