A nanomachined tunable oscillator controlled by electrostatic and optical force.

Authors :: Huang, J. G.
Dong, B.
Cai, H.
Gu, Y. D.
Wu, J. H.
Chen, T. N.
Yang, Z. C.
Jin, Y. F.
Hao, Y. L.
Kwong, D. L.
Liu, A. Q.
Source :: 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 2015, p45-48, 4p
Publication Year :: 2015

Language :: English
ISBNs :: 9781479979554
Database :: Complementary Index
Journal :: 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication Type :: Conference
Accession number :: 102533637
Full Text :: https://doi.org/10.1109/MEMSYS.2015.7050882

Full Text Access

Tools