Phase Transformation of Monocrystalline Silicon Induced by Polishing With Diamond Abrasives.

MLA

Li, Yang, et al. “Phase Transformation of Monocrystalline Silicon Induced by Polishing With Diamond Abrasives.” IEEE Transactions on Semiconductor Manufacturing, vol. 28, no. 2, May 2015, pp. 153–59. EBSCOhost, https://doi.org/10.1109/TSM.2015.2398511.

APA

Li, Y., lu, J., & Xu, X. (2015). Phase Transformation of Monocrystalline Silicon Induced by Polishing With Diamond Abrasives. IEEE Transactions on Semiconductor Manufacturing, 28(2), 153–159. https://doi.org/10.1109/TSM.2015.2398511

Chicago

Li, Yang, Jing lu, and Xipeng Xu. 2015. “Phase Transformation of Monocrystalline Silicon Induced by Polishing With Diamond Abrasives.” IEEE Transactions on Semiconductor Manufacturing 28 (2): 153–59. doi:10.1109/TSM.2015.2398511.