Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors.

MLA

Filipovic, Lado, and Siegfried Selberherr. “Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors.” Sensors (14248220), vol. 15, no. 4, Apr. 2015, pp. 7206–27. EBSCOhost, https://doi.org/10.3390/s150407206.

APA

Filipovic, L., & Selberherr, S. (2015). Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors. Sensors (14248220), 15(4), 7206–7227. https://doi.org/10.3390/s150407206

Chicago

Filipovic, Lado, and Siegfried Selberherr. 2015. “Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors.” Sensors (14248220) 15 (4): 7206–27. doi:10.3390/s150407206.