Preparation of Aluminum Nitride Ceramics by Aqueous Tape Casting.

High compacted aluminum nitride (AlN) substrates were prepared by aqueous tape casting. Aluminium dihydrogen phosphate was used to modify AlN particle surface from hydrolysis during casting process. The absolute value of zeta potential for the AlN particle treated by Al(H2PO4)2was 60mv at pH = 9. The slurry suitable for tape casting was prepared which possessed shear-thinning behavior and appropriate viscosity. The results showed that the green tapes own excellent properties including high bulk density, uniform pore distribution and low porosity. The samples were fired at 1700°C (lower than melting point of Pt) with pressureless sintering process which can be used to fabricate complex device. [ABSTRACT FROM PUBLISHER]