Tunable daughter molds from a single Si master grating mold.

MLA

Shreya Kundu, et al. “Tunable Daughter Molds from a Single Si Master Grating Mold.” Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, vol. 32, no. 5, Sept. 2014, pp. 1–6. EBSCOhost, https://doi.org/10.1116/1.4892063.

APA

Shreya Kundu, Su Hui Lim, Ganesan, R., Hussain, H., Saifullah, M. S. M., Hyunsoo Yang, Ghim Wei Ho, & Bhatia, C. S. (2014). Tunable daughter molds from a single Si master grating mold. Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, 32(5), 1–6. https://doi.org/10.1116/1.4892063

Chicago

Shreya Kundu, Su Hui Lim, Ramakrishnan Ganesan, Hazrat Hussain, Mohammad S. M. Saifullah, Hyunsoo Yang, Ghim Wei Ho, and Charanjit S. Bhatia. 2014. “Tunable Daughter Molds from a Single Si Master Grating Mold.” Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics 32 (5): 1–6. doi:10.1116/1.4892063.