Alternative integration scheme for half-bridge switch using double etched Si3N4 substrate.

Details

Language :

English

ISBNs :

9781479940264

Database :

Complementary Index

Journal :

Proceedings of the 5th Electronics System-integration Technology Conference (ESTC)

Publication Type :

Conference

Accession number :

101234167

Full Text :

https://doi.org/10.1109/ESTC.2014.6962723